ISSM2006(15th)
Date	September 25-27, 2006
Place	Century Hyatt Tokyo <Tokyo, Japan>
Paper	116papers
Keynote Speakers	Andrzej J. Strojwas,Professor of Electrical and Computer Engineering Carnegie Mellon Univ. Chief Technologist PDF Solutions, Inc. Song Hwee Chia,President and Chief Executive Officer,Chartered Semiconductor Manufacturing Yoshifumi Kawamoto,Director,General Manager,R&D Department,Consortium for Advanced Semiconductor Materials and Related Technologies (CASMAT) Shozo Saito,Executive Vice President,Toshiba Semiconductor Company,Corporate Vice President,Toshiba Corporation Kazuo Ushida,President,Precision Equipment Company,Nikon Corporation Young-Bum Koh,Senior Vice President, Technology Center, Semiconductor Business,Samsung Electronics Co., Ltd.